专利名称：A MICROMECHANICAL RESONATOR发明人：KAAJAKARI, Ville申请号：EP09703126.4申请日：20090123公开号：EP2245738B1公开日：20150617
摘要：The invention relates to design of micromechanical resonators and, moreprecisely, to the design of microelectro- mechanical systems (MEMS) resonators. Theinvention provides an improved design structure for a microelectromechanical systems(MEMS) resonator in which the width of the spring elements (3), (23-24), (27- 30) is greaterthan the width of the electrode fingers (5-9), (25-26), (31-34), said widths specificallydimensioned so that the sensitivity of the resonant frequency change with respect todimensional manufacturing variations Formula approaches zero. The improved structureis frequency robust to manufacturing variations and enables reliable frequencyreferencing with good performance, particularly in small size solutions.
申请人：MURATA ELECTRONICS OY
地址：FI
国籍：FI
代理机构：Boco IP Oy Ab
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