HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING

专利名称：HOLLOW CATHODE ION SOURCE AND

METHOD OF EXTRACTING ANDACCELERATING IONS

发明人：CHAMBERS, John,MASCHWITZ, Peter申请号：EP16876262申请日：20161108公开号：EP3390688A4公开日：20190821

摘要：An ion source and a method of extracting and accelerating ions are provided.The ion source includes a chamber. The ion source further includes a first hollow cathodehaving a first hollow cathode cavity and a first plasma exit orifice and a second hollowcathode having a second hollow cathode cavity and a second plasma exit orifice. The firstand second hollow cathodes are disposed adjacently in the chamber. The ion sourcefurther includes a first ion accelerator between and in communication with the firstplasma exit orifice and the chamber. The first ion accelerator forms a first ion accelerationcavity. The ion source further includes a second ion accelerator between and incommunication with the second plasma orifice and the chamber. The second ionaccelerator forms a second ion acceleration cavity. The first hollow cathode and thesecond hollow cathode are configured to alternatively function as electrode andcounterelectrode to generate a plasma.

申请人：AGC Flat Glass North America, Inc.,Asahi Glass Co., Ltd.,AGC Glass Europe

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