Micro-machined optical pressure sensors

专利名称：Micro-machined optical pressure sensors发明人：Hong Cai,Jifang Tao,Julius Ming-Lin

Tsai,Aiqun Liu

申请号：US15036792申请日：20141114公开号：US09823150B2公开日：20171121

专利附图：

摘要：A micro-machined optical pressure sensor, comprising: a diaphragm configuredto deform when a force is applied thereto; and a sensing micro-ring spaced apart fromthe diaphragm by a gap, the gap being variable depending on the force applied on the

diaphragm, wherein the sensing micro-ring is configured to produce a resonancewavelength shift when the gap is varied, the resonance wavelength shift indicative of theforce applied to the diaphragm.

申请人：AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH,NANYANGTECHNOLOGICAL UNIVERSITY

地址：Singapore SG,Singapore SG

国籍：SG,SG

代理机构：Blakely, Sokoloff, Taylor & Zafman LLP

更多信息请下载全文后查看