THIN FILM DEPOSITION DEVICE AND METHOD OF DEPOSITI

专利名称：THIN FILM DEPOSITION DEVICE AND

METHOD OF DEPOSITING THIN FILM USINGTHEREOF

发明人：Cheol Jang,Jin Koo Kang,Sao Youn Kim申请号：US14932742申请日：20151104

公开号：US201602829A1公开日：20161006

专利附图：

摘要：A thin film deposition device and a method of depositing thin film materials aredisclosed. In one aspect, the thin film deposition device includes a deposition chamber

configured to accommodate a substrate and a first chamber plate placed in thedeposition chamber and configured to mount the substrate on a first surface thereof.The thin film deposition device also includes a second chamber plate placed in thedeposition chamber on the opposite side of the first chamber plate with reference to thesubstrate. A plurality of recesses are formed on a surface of the second chamber platefacing the first surface of the first chamber plate such that gas flow is formed throughthe respective recesses.

申请人：Samsung Display Co., Ltd.

地址：Yongin-si KR

国籍：KR

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