SYSTEM AND METHOD FOR AN INTEGRATED ELECTRONIC AND

专利名称：SYSTEM AND METHOD FOR AN

INTEGRATED ELECTRONIC AND OPTICALMEMS BASED SENSOR

发明人：Ivan Padron,Nuggehalli Ravindra申请号：US12705591申请日：20100213

公开号：US20110198711A1公开日：20110818

专利附图：

摘要：This patent discloses an integrated electronic and optical MEMS (micro-electro-mechanical systems) based sensor wherein the same embossed diaphragm is used as the

sensing element of both integrated parts. The optical part of the sensor is based on aFabry-Perot cavity and the electronic part of the sensor is based on the piezoresistiveeffect. The signal output obtained from the electronic part of the sensor will be used toassist the fabrication of the Fabry-Perot cavities and as a reference to establish thequiescence point (Q-point) of the signal output from the optical part of the sensor. Theinvention includes sensors for detecting mechanical movements, such as those caused bypressure, sound, magnetic fields, temperature, chemical reaction or biological activities.

申请人：Ivan Padron,Nuggehalli Ravindra

地址：Carteret NJ US,Summit NJ US

国籍：US,US

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