FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATIO

专利名称：FILM BULK ACOUSTIC RESONATOR, FILTER,

COMMUNICATION MODULE ANDCOMMUNICATION APPARATUS

发明人：Motoaki Hara,Tokihiro Nishihara,Shinji

Taniguchi,Takeshi Sakashita,TsuyoshiYokoyama,Masafumi Iwaki,Masanori Ueda

申请号：US12921150申请日：20080304

公开号：US20110006860A1公开日：20110113

专利附图：

摘要：A piezoelectric thin film resonator of the present has a substrate , anintermediate layer disposed on the substrate and is formed of an insulator, a lowerelectrode disposed on the intermediate layer , a piezoelectric film disposed on the lowerelectrode , and an upper electrode disposed on a position facing the lower electrodewith the piezoelectric film interposed therebetween, in which, in a resonant region wherethe lower electrode and the upper electrode face each other, a space is formed in thesubstrate and the intermediate layer or between the lower electrode and the

intermediate layer and the region of the space is included in the resonant region . Withthe structure, the dissipation of the vibrational energy to the substrate from theresonance portion can be suppressed, thereby improving the quality factor.

申请人：Motoaki Hara,Tokihiro Nishihara,Shinji Taniguchi,Takeshi Sakashita,TsuyoshiYokoyama,Masafumi Iwaki,Masanori Ueda

地址：Tokyo JP,Tokyo JP,Tokyo JP,Tokyo JP,Tokyo JP,Tokyo JP,Tokyo JP

国籍：JP,JP,JP,JP,JP,JP,JP

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