Capacitance type displacement detection apparatus

专利名称：Capacitance type displacement detection

apparatus

发明人：Kenichi Nakayama,Toshihiro

Hasegawa,Atsushi Tominaga

申请号：US09727700申请日：20001204

公开号：US20010038292A1公开日：20011108

摘要：A transmission electrode and a detection electrode are placed in an electrodesection of a sensor and are capacity-coupled with a reception electrode placed on anopposed scale. Capacity change between the transmission electrode and the receptionelectrode caused by displacement is detected with the detection electrode . A pluralityof signals different in phase are supplied to the transmission electrode . The signal linesare wired like a zigzag using an upper layer and a lower layer and the distances betweenthe signal lines and the detection electrode are made substantially equal for makinguniform the crosstalk amounts relative to the detection electrode

申请人：MITUTOYO CORPORATION

更多信息请下载全文后查看