IC testing methods and apparatus

专利名称：IC testing methods and apparatus发明人：Amir Zjajo,Manuel Jose Barragan Asian,Jose

De Jesus Pineda De Gyvez

申请号：US12596734申请日：20080430公开号：US08310265B2公开日：20121113

专利附图：

摘要：An integrated circuit comprises a device under test and embedded test circuitry.The embedded test circuitry comprises a plurality of process monitoring sensors, athreshold circuit for comparing the sensor signals with a threshold window having an

upper and a lower limit and a digital interface for outputting the threshold circuit signal.The process monitoring sensors comprise circuitry based on the circuit elements of thedevice under test. This arrangement enables monitoring of circuit element performance,such as transistor properties, using process monitoring sensors which are embedded withthe device under test, so that the same process parameter variations apply to thesensors as to the device under test. The sensors preferably match the physical layout ofthe device under test.

申请人：Amir Zjajo,Manuel Jose Barragan Asian,Jose De Jesus Pineda De Gyvez

地址：Eindhoven NL,Seville ES,Eindhoven NL

国籍：NL,ES,NL

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