专利名称：Physical quantity sensor and method for
manufacturing the same
发明人：Shigenori Suzuki,Hisanori Yokura,Kenichi
Yokoyama,Tetsuo Fujii,Kazuhiko Sugiura
申请号：US12385848申请日：20090421公开号：US07821085B2公开日：20101026
专利附图：
摘要：A physical quantity sensor includes: a sensor substrate including a first supportsubstrate, a first insulation film and a first semiconductor layer, which are stacked in this
order; a cap substrate including a second support substrate disposed on the firstsemiconductor layer, and has a P conductive type; and multiple electrodes, which areseparated from each other. The first support substrate, the first insulation film and thefirst semiconductor layer have the P conductive type. The physical quantity is detectedbased on a capacitance between the plurality of electrodes, and the electrodes aredisposed in the first semiconductor layer.
申请人：Shigenori Suzuki,Hisanori Yokura,Kenichi Yokoyama,Tetsuo Fujii,KazuhikoSugiura
地址：Toyoake JP,Obu JP,Nagoya JP,Toyohashi JP,Nagoya JP
国籍：JP,JP,JP,JP,JP
代理机构：Posz Law Group, PLC
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