专利名称：A QUANTITATIVE SECONDARY ELECTRON
DETECTION
发明人：JYOTI AGRAWAL, Jyoti,SUBHADARSHI
NAYAK, Subhadarshi,DAVID C JOY, David
申请号：EP15859974.6申请日：20151021公开号：EP3210232A1公开日：20170830
摘要：Quantitative Secondary Electron Detection (QSED) using the array of solid statedevices (SSD) based electron-counters enable critical dimension metrologymeasurements in materials such as semiconductors, nanomaterials, and biologicalsamples (FIG. 3). Methods and devices effect a quantitative detection of secondaryelectrons with the array of solid state detectors comprising a number of solid statedetectors. An array senses the number of secondary electrons with a plurality of solidstate detectors, counting the number of secondary electrons with a time to digitalconverter circuit in counter mode.
申请人：Sciencetomorrow, LLC
地址：145 Graham Avenue Suite A217 Lexington, KY 40506-0286 US
国籍：US
代理机构：inCompass IP Europe Limited
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